FZ Silicon wafer
High purity Si wafer for semiconductor industry
Material : Float Zone method grown silicon crystal – FZ Si
Process : cutting and one face polishing or double face polishing
Dimensions: from diameter 1″ to 12″ ( 25.4mm to 304.8 mm)
Thickness : 25µm to 1mm
Shape : round with a flat cut. Can be custom diced.
Types : P-type, N-Type, Semi-insulating
Surface quality : Ra better than 0.2 nm
Surface coating : Nitride film, Oxide film or metal coating (Au, Ag, Pr, Cu, Ti, Ni..)
Orientation : <100>, <111>, <110>
TTV : lower than 10 µm or lower than 5 µm or lower than 3 µm
Bow : better than 20 µm for wafers up to 5″, better than 50 µm for 12″ wafers
Resistivity : 1 Ohm.cm to 100,000 Ohm.cm
Usage : semiconductor industry