HRFZ Si Wafer

High Resistivity Silicon wafer

Part details

Material :

HRFZ Si  (High Resistivity, FZ grown Silicon) Prime grade, undoped

Orientation : <100>

Manufacturing process :

Fine cut of FZ grown silicon crystal, double-side polishing, clean room packaging.

Dimensions:

D100 mm +/- 0.1mm

Th :   3 mm

Shape :

Round thin plate

Specifications:

Perpendicularity : better than 0.02mm

Parallelism : better than 0.02 mm

TTV : 3µm

Electrical resistivity : higher than 10 000 Ω.cm

Optical treatment :

None

Usage :

Online measurement device, HRFZ have a very good transmission in the IR and THz spectrum, the part is used @ 1000nm-6000nm